Scanning-Beam Interference Lithography (SBIL)
Applications:
Spatial Frequency Multiplication through Multilevel Interference Lithography
Integrated Opto-Electronics
Large-Area Chirped Transmission and Reflection Gratings
Related Publications and Talks:
- Y. Zhao, D. L. Trumper, R. K. Heilmann, and M. L. Schattenburg
Optimization and Temperature Mapping of an Ultra-High Thermal Stability Environmental Enclosure
Precision Engineering 34, 164-170 (2010).
- C.-H. Chang, Y. Zhao, R. K. Heilmann, and M. L. Schattenburg
Spatial-Frequency Multiplication with Multilevel Interference Lithography
J. Vac. Sci. Technol. B 26, 2135-2138 (2008).
- C.-H. Chang, Y. Zhao, R. K. Heilmann, and M. L. Schattenburg
Fabrication of 50 nm-Period Gratings with Multilevel Interference Lithography
Opt. Lett. 33, 1572 (2008).
- C.-H. Chang, R. K. Heilmann, M. L. Schattenburg, and P. Glenn
Design of a Double-Pass Shear Mode Acousto-Optical Modulator
Rev. Sci. Instrum. 79, 033104 (2008).
- Y. Zhao, C.-H. Chang, R. K. Heilmann, and M. L. Schattenburg
Phase Control in Multiexposure Spatial Frequency Multiplication
J. Vac. Sci. Technol. B 25, 2439 (2007).
- J. C. Montoya, C.-H. Chang, R. K. Heilmann, and M. L. Schattenburg
Doppler Writing and Linewidth Control for Scanning Beam Interference Lithography
J. Vac. Sci. Technol. B 23, 2640 (2005).
- R. K. Heilmann, C. G. Chen, P. T. Konkola, and M. L. Schattenburg
Dimensional Metrology for Nanometer-Scale Science and Engineering:
Towards Sub-Nanometer Accurate Encoders (Invited)
Nanotechnology 15, S504 (2004).
- P. T. Konkola, C. G. Chen, R. K. Heilmann, C. Joo, J. C. Montoya,
C.-H. Chang, and M. L. Schattenburg
Nanometer-Level Repeatable Metrology Using the Nanoruler
J. Vac. Sci. Technol. B 21, 3097 (2003).
- C. G. Chen, P. T. Konkola, R. K. Heilmann, C. Joo, and M. L. Schattenburg
Nanometer-Accurate
Grating Fabrication with Scanning Beam Interference Lithography
Proc. SPIE 4936, 126 (2002).
- C. Joo, G. S. Pati, C. G. Chen, P. T. Konkola, R. K. Heilmann,
and M. L. Schattenburg
Effects of Varying
Incident Angle on the Contrast of the Fringe Metrology Using a Fresnel
Zone Plate
Proceedings of the 17th Annual Meeting of the American Society
for Precision Engineering (ASPE, Raleigh, NC), 83 (2002).
- G. S. Pati, R. K. Heilmann, P. T. Konkola, C. Joo, C. G. Chen,
E. Murphy, and M. L. Schattenburg
A Generalized Scanning
Beam Interference Lithography System for Patterning Gratings with Variable
Period Progression
J. Vac. Sci. Technol. B 20, 2617 (2002).
- C. Joo, G. S. Pati, C. G. Chen, P. T. Konkola, R. K.
Heilmann, and M. L. Schattenburg
Nanometer-Accurate
Fringe Metrology Using a Fresnel Zone Plate
J. Vac. Sci. Technol. B 20, 3075 (2002).
- C. G. Chen, R. K. Heilmann, C. Joo, P. T. Konkola,
G. S. Pati, and M. L. Schattenburg
Beam Alignment for
Scanning Beam Interference Lithography
J. Vac. Sci. Technol. B 20, 3071 (2002).
- P. T. Konkola, C. G. Chen, R. K. Heilmann, G. S. Pati, and M. L. Schattenburg
Scanning Beam Interference Lithography
(Invited Talk)
Proceedings of the 2001 ASPE Annual Meeting
- C. G. Chen, R. K. Heilmann, P. T. Konkola, R. K. Heilmann,
G. S. Pati, and M. L. Schattenburg
A Novel Sub-Microradian beam diagnostic and alignment system
Proceedings of the 2001 ASPE Annual Meeting
- M. L. Schattenburg, C. G. Chen, R. K. Heilmann, and P. T.
Konkola
Progress Toward a
General Grating Pattern Technology Using Phase-Locked Scanning Beams
Optical Spectrocopic Techniques and Instrumentation for Atmospheric
and Space Research IV,
S. C. Barden and M. G. Mlynczak (eds.),
Proc. SPIE 4485, 378 (2002).
- C. G. Chen, P. T. Konkola, R. K. Heilmann, G. S. Pati,
and M. L. Schattenburg
Image Metrology and System Controls for Scanning Beam Interference Lithography
(Invited)
J. Vac. Sci. Technol. B. 19, 2335 (2001).
- R. K. Heilmann, P. T. Konkola, C. G. Chen, G. S. Pati,
and M. L. Schattenburg
Digital Heterodyne Interference Fringe Control System
J. Vac. Sci. Technol. B. 19, 2342 (2001).
- C. G. Chen, P. T. Konkola, J. Ferrera, R. K. Heilmann,
and M. L. Schattenburg
Analyses
of Vector Gaussian Beam Propagation and the Validity of Paraxial and Spherical
Approximations
J. Opt. Soc. Am. A 19, 404 (2002).
- P. T. Konkola, C. G. Chen, R. K. Heilmann, and M. L.
Schattenburg
Beam Steering System and Spatial Filtering Applied to Interference Lithography
J. Vac. Sci. Technol. B 18, 3282 (2000).
- R. K. Heilmann, P. T. Konkola, C. G. Chen, and M. L.
Schattenburg
Relativistic Corrections in Displacement Measuring Interferometry
J. Vac. Sci. Technol. B 18, 3277 (2000).
- M. L. Schattenburg, C. Chen, P. N. Everett, J. Ferrera,
P. Konkola, and H. I. Smith,
Sub-100 nm Metrology Using Interferometrically Produced Fiducials
(Invited)
J. Vac. Sci. Technol. B 17, 2692-2697 (1999).